Developer solution for fine patterns
● What is Developer solution for fine patterns?
- DC Series is a potassium carbonate based DF concentrate. In DF development, Resist-Foot residual relaxation and suppression of side-wall part phenomenon are suppressed to provide excellent development performance in fine pattern.
▶ Dry film and PSR application
▶ Improve productivity
: Reduction of process scum occurrence
▶ Economical and easy to handle
● Application example of DF phenomenon