Developer solution for fine patterns

What is Developer solution for fine patterns?
- DC Series is a potassium carbonate based DF concentrate. In DF development, Resist-Foot residual relaxation and suppression of side-wall part phenomenon are suppressed to provide excellent development performance in fine pattern.

● Features
▶ Dry film and PSR application
 Improve productivity
: Reduction of process scum occurrence
 Economical and easy to handle

DF phenomenon test

● Application example of DF phenomenon