PECS Plasma Eye Chromatics Stethoscope System
● What is PECS Plasma Eye Chromatics Stethoscope System?
- PECS maximizes process efficiency by applying algorithm optimizations by collecting / analyzing plasma state of semiconductor through high speed optical sensor (100KHz).
● Features
▶ High-speed/high-resolution optical sensor
▶ Process algorithm optimization
▶ Selectable process-specific sensors
- Abnormal & Arc: HB-PSA
-EPD and clean condition: HB-PSD
▶ Optimization for Smart-Chamber Implementation
▶ Avoid Etch & PVD issues
▶ Simple and intuitive UI & analyzer
▶ Chamber State Prediction
▶ Provide basic algorithm and change setting function
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● Mechanism
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● PECS specifications
▶ Other sensors per process
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▶ Specifications
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