X-BCl₃
● Application Field
- Ion Implant Process, Ashing Process, Epi Process, Chemical Vapor Deposition(CVD) Process, For reducing of Acid Vapors such as HCl, HF, HBr, BCl3, etc.
● Characteristic
▶ Appearance & Size : Pellet (ø=4.0, more)
▶ Color : Brown
▶ Bulk density : 0.6~0.7g/cc
▶ Crush strength : > 4kgf/㎠
▶ Upper temp. limit : < 100℃
● Appearance
● Reaction Mechanism
Gas | Mechanism | TLV (ppm) |
|---|---|---|
BCl3 | BCl3 + 3MOH → 3MCl + B(OH)3 | 5 |
BCl3 + 3MO(OH) → 3MOCl + B(OH) | ||
HBr | 2HBr + M(OH)2 → MBr2+ 2H2O | 3 |
HCl | 3HCl + MO(OH) →MCl3 + 2H2O | 5 |
HF | 6HF + M2O3 → 2MF3 + 3H2O | 3 |
SiH4 | SiH4 + 2MOH →M2Si + 2H2O + H2 | 5 |