HS-PFC(for reducing PFCs)



● Application Field

- Semi-Conductor or LCD/TFT Processing, Amorphous Silicon Thin Film Solar Battery Process, etc.


● Characteristic

▶ Appearance & Size : Granules (4x8 mesh)
▶ Color : Dark navy
▶ Bulk density : ~0.4g/cc
▶ Crush strength : > 4.0 kgf/㎠
▶ Recomm. operating temp. : 400~800℃
▶ Upper temp. limit : < 1,000℃


● Appearance



● Reaction Mechanism

Gas

Mechanism

NF3, CHF3, SF6, CF4, C2F6, C3F8, c-C4F8

XFn +M → MF + XO(XO2)

XFn + H2O → HF + XO(XO2)



● PFC Destruction – Effects of PFC