X-Cl₂
● Application Field
- Ion Implant Process, Ashing Process, Epi Process, Chemical Vapor Deposition(CVD) Process, For reducing of Acid Vapors such as Cl2, F2, etc.
● Characteristic
▶ Appearance & Size : Pellet (ø=2.2, more)
▶ Color : White
▶ Bulk density : 0.6~0.7g/cc
▶ Crush strength : > 2.0kgf/㎠
▶ Upper temp. limit : < 100℃
● Appearance
● Reaction Mechanism
Gas | Mechanism | TLV (ppm) |
|---|---|---|
Cl2 | Cl2 + 2MOH → 2MCl + H2O + 1/2O2 | 1 |
Cl2 + M(OH)2 → MCl2 + H2O + 1/2O2 |