X-Amines
● Application Field
- Diffusion Process, Chemical Vapor Deposition(CVD) Process, For reducing of Alkaline Gases such as NH3, TMA, Amino-Silane, etc.
● Characteristic
▶ Appearance & Size : Pellet (ø=4.0, more)
▶ Color : Light brown
▶ Bulk density : 0.8g/cc
▶ Crush strength : > 4.0kgf/㎠
▶ Upper temp. limit : < 100℃
● Appearance
● Reaction Mechanism
Gas | Mechanism | TLV (ppm) |
|---|
NH3 | 4NH3 + MSO4 →M(NH3)4SO4 | 25 |