Protective Coating Agent for Laser Saw
- Using coating agent is depends on the wafer type and/or laser source.
Chip Guard –5000 is generally made for low_K (low dielectric constant)wafer. Safe Guard –8000 is made for special wafer such as optodevices wafer, image censer wafer...
● Product name: CHIP GUARD (LC-5000) and SAFE GUARD (LC-8000)
- Faults are commonly found when laser sawing wafer due to melted silicon particles scattered on the cutting surface, even after cleaning. By using our CHIP GUARD in the spin-coating process, creates film protectant to shield the chips surface, in preparation for sawing. Chip Guard (LC-5000) provides superior leveling/spreading when spin coating.
▶ Physical characteristics
