Purified Nitric Acid


• Molecular Formula : HNO3

• Appearance : Transparent Solution

• CAS No : 7697-37-2

• HS Code : 2808-00-1000


Eunjin Chemical's purified Nitric Acid


Nitric acid is widely used in semiconductor processes. It is not only used to etch silicon, to etch and expose the critical layer in the front-end processing of semiconductor, but is also useful for chemical-mechanical polishing of interconnect metallization, in compounds for etching various heavy metals, for defect etching and for solar panel cleaning.

Eunjin Chemical’s HNO3 is purified using a the latest refining facilities that provides ultra-high purify Nitric acid with the residue (Zn, Pb, Ni, Cu, Fe, Mg, Al, and Ca) at low ppb levels. Continuous efforts in developing technology will lead to higher quality with lowering metal impurity levels to ppt.


About Purified Nitric Acid


• Colorless liquid, soluble in ether / alcohol (explosive)

• Yellowish and corrosive liquid with peculiar order. It emits irritative and white smoke in contact with air. It is condensed when cooled to –40 ° C.

• It corrodes most metals except gold and platinum precipitating nitrate.

• It discolors into brown when exposed to sunlight for a long time.


Application


• Semiconductor equipment cleaning

• Semiconductor etchant

• Silicon wafer cleaning

• Solar panel cleaning


Specification


Items

Extra Pure

Appearance

Transparent solution

Assay (%)

65±0.5 Wt

Chlorine (ppb)

Max 50

SO4 (ppb)

Max 100

Si (ppb)

Max 10

PO4 (ppb)

Max 50

Residue (ppb)

Max 1000

Na (ppb)

Max 10

Mg (ppb)

Max 10

Al (ppb)

Max 5

K (ppb)

Max 10

Ca (ppb)

Max 10

Cr (ppb)

Max 5

Mn (ppb)

Max 2

Fe (ppb)

Max 10

Nl (ppb)

Max 2

Cu (ppb)

Max 1

Zn (ppb)

Max 5

Pb (ppb)

Max 3

Ag (ppb)

Max 1

As (ppb)

Max 1

Ba (ppb)

Max 1

Cd (ppb)

Max 1

Co (ppb)

Max 1

Ga (ppb)

Max 1

Ge (ppb)

Max 1

Li (ppb)

Max 1

Sn (ppb)

Max 5

Sr (ppb)

Max 1

Au (ppb)

Max 1

Sb (ppb)

Max 10

B (ppb)

Max 1

Packing Unit

CAN

DRUM

BULK